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Direct Write Lithography

i-line Stepper

ASML pas 5500/100 i-line Stepper

Stepper Applications

  • 4" Silicon wafers stock
  • 6" Silicon wafers stock
  • Customer supplied wafers can also be written

Stepper Specifications

  • 5 x 1 reduction
  • Minimum resolution 400 nm
  • Up to 6" wafers
  • Quartz halogen lamp
  • 1" by 1" steps
i-line stepper i-line stepper

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