Direct Write Lithography

i-line Stepper

ASML pas 5500/100 i-line Stepper

Stepper Applications

• 4" Silicon wafers stock
• 6" Silicon wafers stock
• Customer supplied wafers can also be written

Stepper Specifications

• 5 x 1 reduction
• Minimum resolution 400 nm
• Up to 6" wafers
• Quartz halogen lamp
• 1" by 1" steps