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Greyscale is a proven technology with
outstanding performance. A true
grayscale pattern has a unique application range. There are 64 grey levels which provide
diffractive optical elements. High
resolution hologram patterns can have 1 μm feature size. It can also be used to create 3 dimensional
microstructures in the photoresist which will remain after processing. Greyscale
lithography is a sculpturing process used to form desired patterns in
photoresist. These patterns can be
formed into lenses and lens arrays, tapered microfluidic channels used to
separate samples.
This sculpted image could have various
applications in microfluidics [need some more applications] etc.., but it is
also an efficient and economic way to prototype your device because there are
no expensive gray tone masks required in the process.
Minimum feature size: 0.8μm
Minimum tolerance: +/- 100nm
Best writing grid: 20 nm
Edge roughness 3σ : 120 nm
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